This project renovated an existing 10,000 square-foot semiconductor processing cleanroom space for a new research and design and prototyping facility.
The renovation involved the installation of 18 specialized process and utility equipment, including a new process cooling water unit, hydrogen and oxygen tanks, evaporators, data output systems, an acid scrubber, as well as associated ductwork, piping, and conduit. The scope also included upgrades to life-safety systems and fire protection infrastructure.
The completed development and prototyping facility provides a collaborative space for faculty and students to work with new 300mm tools, the same equipment used in a production fab. This supports the Valley’s growing semiconductor network.
